Concepedia
Statistics
Publications
12
Citations
259
H-Index
11
Active since
1997
Affiliations
Chemnitz University of Technology(Current)
InfraTec (Germany)
Fraunhofer Institute for Electronic Nano Systems
Fraunhofer Institute for Reliability and Microintegration
Jenoptik (Germany)
Steffen Kurth is an author at Chemnitz University of Technology specializing in engineering, optics, and photonics.
Publications per year
1997–2018
Silicon mirrors and micromirror arrays for spatial laser beam modulation
Steffen Kurth, Ramon Hahn, Christian A. Kaufmann et al. · Sensors and Actuators A Physical · 1998 · 52 citations
Engineering, Electrical Engineering, Mechanical Engineering +15
Tunable infrared detector with integrated micromachined Fabry-Perot filter
Norbert Neumann, Martin Ebermann, Karla Hiller et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 35 citations
Engineering, Electrical Engineering, Optics +15
Determination of Parameters With Uncertainties for Quality Control in MEMS Fabrication
Marc Gennat, Marco Meinig, Alexey Shaporin et al. · Journal of Microelectromechanical Systems · 2013 · 28 citations
Engineering, Electrical Engineering, Mechanical Engineering +17
Widely tunable Fabry-Perot filter based MWIR and LWIR microspectrometers
Martin Ebermann, Norbert Neumann, Karla Hiller et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 25 citations
Engineering, Materials Engineering, Materials Science +17
Recent advances in expanding the spectral range of MEMS Fabry-Perot filters
Martin Ebermann, Norbert Neumann, Karla Hiller et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 22 citations
Engineering, Electrical Engineering, Materials Science +17
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