Statistics
Publications
4
Citations
78
H-Index
4
Active since
2001
Affiliations
Micron (United States)(Current)
Toru Kimura is an author at Micron (United States) specializing in line roughness, resist resolution, and line-edge roughness.
Publications per year
2001–2015
4
4
Kisuke Nagase, Yukio Kamiya, Toru Kimura et al. · NIPPON KAGAKU KAISHI · 2001 · 10 citations · Full text
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