U. Stephan

A new concept for mass production of large area thin-film silicon solar cells on glass

B. Rech, T. Repmann, S. Wieder et al. · Thin Solid Films · 2005 · 37 citations

Engineering, Materials Engineering, Materials Science +14

Power Feeding in Large Area PECVD of Amorphous Silicon

J. Kuske, U. Stephan, O. Steinke et al. · MRS Proceedings · 1995 · 31 citations

Engineering, Materials Engineering, Materials Science +12

ITER visible spectroscopy reference system first mirror plasma cleaning in radio-frequency gas discharge – circuit design and plasma effects

A.G. Ushakov, Ad Verlaan, U. Stephan et al. · Fusion Engineering and Design · 2020 · 18 citations

Natural Sciences, Electrical Engineering, Physics +12

VHF plasma processing for in-line deposition systems

Jan Rüdiger, H. M. Brechtel, A. Kottwitz et al. · Thin Solid Films · 2003 · 16 citations

Natural Sciences, Materials Engineering, Physics +11

Problems of Power Feeding in Large Area PECVD of Amorphous Silicon

U. Stephan, J. Kuske, Heinrich Grüger et al. · MRS Proceedings · 1999 · 11 citations

Engineering, Materials Engineering, Materials Science +12