Concepedia

A. Kottwitz

AK

4

Publications

54

Citations

4

H-Index

1995

Active since

Affiliations

Technische Universität Dresden(Current)

Forschungs- und Applikationslabor Plasmatechnik (Germany)

A. Kottwitz is an author at Technische Universität Dresden specializing in engineering, electrical engineering, and microstructure.

Top concepts

EngineeringElectrical EngineeringMicrostructureApplied PhysicsMicroelectronicsPhotovoltaicsInstrumentationMaterial ScienceMicrofabricationMagnetohydrodynamics

Publications per year

1995–2003

4

Publications

4

Investigation of growth mechanisms of microcrystalline silicon in the very high frequency range

R. Terasa, Matthias Albert, Heinrich Grüger et al. · Journal of Non-Crystalline Solids · 2000 · 17 citations

Materials Science, Wafer Scale Processing, Engineering +10

VHF plasma processing for in-line deposition systems

Jan Rüdiger, H. M. Brechtel, A. Kottwitz et al. · Thin Solid Films · 2003 · 16 citations

Electrical Engineering, Engineering, Magnetohydrodynamics +6

Problems of Power Feeding in Large Area PECVD of Amorphous Silicon

U. Stephan, J. Kuske, Heinrich Grüger et al. · MRS Proceedings · 1999 · 11 citations

Electrical Engineering, Engineering, Large Area Pecvd +8

High rate PECVD of a-Si alloys on large areas

S. Röhlecke, R. Tews, A. Kottwitz et al. · Surface and Coatings Technology · 1995 · 10 citations

Materials Engineering, Electrical Engineering, Engineering +3

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