Concepedia

R. Terasa

RT

2

Publications

29

Citations

2

H-Index

2000

Active since

Affiliations

Technische Universität Dresden(Current)

R. Terasa is an author at Technische Universität Dresden specializing in microfabrication, applied physics, and materials science.

Top concepts

Publications per year

2000–2005

2

Publications

2

Investigation of growth mechanisms of microcrystalline silicon in the very high frequency range

R. Terasa, Matthias Albert, Heinrich Grüger et al. · Journal of Non-Crystalline Solids · 2000 · 17 citations

, , +10

Alternative etching gases to SF6 for plasma enhanced chamber cleaning in silicon deposition systems

T. Rößler, M.L. Albert, R. Terasa et al. · Surface and Coatings Technology · 2005 · 12 citations

Rows per page

1–2 of 2