MRS Proceedings · 1999 · 11 citations · 2 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsAmorphous Electronic MaterialsAmorphous MaterialsAmorphous SemiconductorsAmorphous SolidsSemiconductor Device MaterialsSilicon MaterialsAmorphous SiliconSiliconSilicon Device Materials
2
Power Feeding in Large Area PECVD of Amorphous Silicon
J. Kuske, U. Stephan, O. Steinke et al. · MRS Proceedings · 1995 · 31 citations
Plasma processes under vacuum conditions
A. Bubenzer, Johannes Schmitt · Vacuum · 1990 · 26 citations