Concepedia
Statistics
Publications
7
Citations
274
H-Index
Active since
1992
Affiliations
Lawrence Berkeley National Laboratory(Current)
University of California, Berkeley
Lawrence Livermore National Laboratory
Intel (United States)
P. Batson is an author at Lawrence Berkeley National Laboratory specializing in natural sciences, optics, and x-ray optics.
Publications per year
1992–2009
High-resolution, high-transmission soft x-ray spectrometer for the study of biological samples
L. Weinhardt, M. Blum, Markus Weigand et al. · Review of Scientific Instruments · 2009 · 93 citations · Full text
Natural Sciences, Materials Science, Biomedical Optics +15
Tunable coherent radiation in the soft X-ray and extreme ultraviolet spectral regions
David Attwood, Patrick Naulleau, Kenneth A. Goldberg et al. · IEEE Journal of Quantum Electronics · 1999 · 52 citations
Natural Sciences, Physics, Optics +12
A Soft X-Ray/EUV Reflectometer Based on a Laser Produced Plasma Source
Eric M. Gullikson, J. H. Underwood, P. Batson et al. · Journal of X-Ray Science and Technology · 1992 · 48 citations
Natural Sciences, Physics, Optics +13
Sub-70 nm extreme ultraviolet lithography at the Advanced Light Source static microfield exposure station using the engineering test stand set-2 optic
Patrick Naulleau, Kenneth A. Goldberg, Erik H. Anderson et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 38 citations
Natural Sciences, Electrical Engineering, Microfabrication +11
Extreme ultraviolet alignment and testing of a four-mirror ring field extreme ultraviolet optical system
Kenneth A. Goldberg, Patrick Naulleau, P. Batson et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 19 citations
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