Concepedia

Isao Ochiai

IO

Statistics

Publications

4

Citations

123

H-Index

4

Active since

1988

Affiliations

Hitachi (Japan)(Current)

Isao Ochiai is an author at Hitachi (Japan) specializing in natural sciences, surface science, and materials science.

Publications per year

1988–1997

4

Publications

4

Plasma focus x-ray source for lithography

Yasuo Kato, Isao Ochiai, Yoshio Watanabe et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 68 citations

Natural Sciences, Physics, Microfabrication +12

Atomic hydrogen cleaning of GaAs and InP surfaces studied by photoemission spectroscopy

T. Kikawa, Isao Ochiai, Shinichiro Takatani · Surface Science · 1994 · 33 citations

Natural Sciences, Materials Engineering, Materials Science +11

Formation of a thin SiO2 film using synchrotron radiation excited reaction

Taro Ogawa, Isao Ochiai, Kōzō Mochiji et al. · Applied Physics Letters · 1991 · 12 citations

Natural Sciences, Materials Engineering, Materials Science +17

Positive Charge Generation at a SiO<sub>2</sub>/Si Interface due to Bombardment with Metastable Atoms

Tetsuo Ono, Naoshi Itabashi, Isao Ochiai et al. · Japanese Journal of Applied Physics · 1997 · 10 citations

Natural Sciences, Materials Science, Physics +16

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