Juergen Ramm

Structural characterization of thick, high-quality epitaxial Ge on Si substrates grown by low-energy plasma-enhanced chemical vapor deposition

Shawn Thomas, Sushil Bharatan, Robert E. Jones et al. · Journal of Electronic Materials · 2003 · 40 citations

Materials Science, Structural Characterization, Engineering +8

Silicon Molecular Beam Epitaxy on Hydrogen-Plasma-Cleaned Substrates

W. Hänsch, E. Hammerl, W. Kiunke et al. · Japanese Journal of Applied Physics · 1994 · 16 citations

Engineering, Integrated Circuits, Vacuum Device +16

Silicon nitride thin films by low voltage reactive ion plating: optical properties and composition

Bertrand G. Bovard, Juergen Ramm, Ralf Hora et al. · Applied Optics · 1989 · 16 citations

Materials Science, Materials Engineering, Chemical Engineering +14

Low Temperature In-Situ Processing for Si-MBE

Juergen Ramm, Eugen Beck, Albert Zueger · MRS Proceedings · 1991 · 15 citations

Materials Science, Wafer Scale Processing, Engineering +4

Dry Hydrogen Plasma Cleaning for Local Epitaxial Growth

Juergen Ramm, Eugen Beck, I. Eisele et al. · MRS Proceedings · 1993 · 10 citations

Materials Engineering, Engineering, Surface Science +5