Journal of Electronic Materials · 2003 · 41 citations · 16 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsChemical Vapor DepositionEpitaxial GrowthSemiconductor Crystal GrowthSemiconductor Device MaterialsSemiconductor Thin FilmsSilicon MaterialsChemical Vapor Deposition MaterialsEpitaxial Film GrowthEpitaxial InterfacesEpitaxial MaterialsPlasma-enhanced Chemical Vapor DepositionPlasma-enhanced DepositionSilicon Chemical Vapor DepositionSilicon Epitaxy
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Laura M. Giovane, Hsin-Chiao Luan, Anu Agarwal et al. · Applied Physics Letters · 2001 · 174 citations