Structural characterization of thick, high-quality epitaxial Ge on Si substrates grown by low-energy plasma-enhanced chemical vapor deposition

Shawn Thomas, Sushil Bharatan, Robert E. Jones, R. Thomä, Thomas E. Zirkle, N. V. Edwards, Ran Liu, Xiang Dong Wang, Qianghua Xie, C. Rosenblad,

Journal of Electronic Materials · 2003 · 41 citations · 16 references

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