S. S. Borisov

EBIC measurements of small diffusion length in semiconductor structures

E. B. Yakimov, S. S. Borisov, S. I. Zaitsev · Semiconductors · 2007 · 55 citations

CHARIOT: Software tool for modeling SEM signal and e-beam lithography

S. Babin, S. S. Borisov, A. Ivanchikov et al. · Physics Procedia · 2008 · 35 citations · Full text

Engineering, Electron-beam Lithography, Beam Lithography +7

Angular Molecular–Electronic Sensor with Negative Magnetohydrodynamic Feedback

Egor Egorov, Vadim Agafonov, Svetlana Avdyukhina et al. · Sensors · 2018 · 29 citations · Full text

Engineering, Measurement, Accelerometer +16

Contrast reversal effect in scanning electron microscopy due to charging

H. Abe, S. Babin, S. S. Borisov et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 27 citations

Electrical Engineering, Engineering, Critical Dimension +14

Simulation of scanning electron microscope images taking into account local and global electromagnetic fields

S. Babin, S. S. Borisov, Hiroyuki Ito et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 17 citations

Engineering, Sem Imaging, Microscopy +20