A. Ivanchikov

CHARIOT: Software tool for modeling SEM signal and e-beam lithography

S. Babin, S. S. Borisov, A. Ivanchikov et al. · Physics Procedia · 2008 · 35 citations · Full text

Engineering, Electron-beam Lithography, Beam Lithography +7

Simulation of scanning electron microscope images taking into account local and global electromagnetic fields

S. Babin, S. S. Borisov, Hiroyuki Ito et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 17 citations

Engineering, Sem Imaging, Microscopy +20

Modeling of linewidth measurement in scanning electron microscopes using advanced Monte Carlo software

S. Babin, S. S. Borisov, A. Ivanchikov et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 17 citations

Engineering, Electron-beam Lithography, Measurement +22

Investigation of factors causing difference between simulation and real SEM image

Motoki Kadowaki, A. Hamaguchi, Hideki Abe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 14 citations

Geophysics, Surface Characterization, Engineering +13