14
Publications
404
Citations
12
H-Index
1966
Active since
Robert E. Sacher is an author at University of Pittsburgh specializing in engineering, chemistry, and polymer chemistry.
Top concepts
EngineeringChemistryPolymer SciencePolymer ChemistryChemical EngineeringPolymersPhotochemistryApplied PhysicsInstrumentationMicroelectronics
Publications per year
1966–1996
14
14
Ion projection system for IC production
G. Stengl, R. Kaitna, H. Löschner et al. · Journal of Vacuum Science and Technology · 1979 · 37 citations
Ion Projection System, Engineering, Electron-beam Lithography +20
Rows per page
1–5 of 14