D. Klaus

Tunable Coupling Architecture for Fixed-Frequency Transmon Superconducting Qubits

J. Stehlik, D. M. Zajac, Devin Underwood et al. · Physical Review Letters · 2021 · 156 citations · Full text

Two-Dimensional Pattern Formation Using Graphoepitaxy of PS-<i>b</i>-PMMA Block Copolymers for Advanced FinFET Device and Circuit Fabrication

Hsinyu Tsai, Jed W. Pitera, Hiroyuki Miyazoe et al. · ACS Nano · 2014 · 153 citations

Engineering, Molecular Self-assembly, Pattern Transfer +17

Density scaling with gate-all-around silicon nanowire MOSFETs for the 10 nm node and beyond

Sarunya Bangsaruntip, Karthik Balakrishnan, S.-L. Cheng et al. · 2013 · 96 citations

Electrical Engineering, Engineering, Physics +13

High performance 0.1 μm CMOS devices with 1.5 V power supply

Y. Taur, Shalom J. Wind, Y. J. Mii et al. · 2002 · 92 citations

Low-power Electronics, High Performance 0.1, Electrical Engineering +12

A high performance liner for copper damascene interconnects

D. Edelstein, Cyprian Uzoh, C. Cabral et al. · 2001 · 90 citations

Materials Science, 3D Ic Architecture, Electrical Engineering +13