Statistics
Publications
5
Citations
228
H-Index
5
Active since
2004
Affiliations
NEC (Japan)(Current)
Masaki Satake is an author at NEC (Japan) specializing in engineering, materials engineering, and materials science.
Publications per year
2004–2012
5
5
EUV mask multilayer defects and their printability under different multilayer deposition conditions
Hyuk Joo Kwon, Jenah Harris-Jones, Aaron Cordes et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 15 citations
Natural Sciences, Materials Engineering, Materials Science +17
Compensation for EUV multilayer defects within arbitrary layouts by absorber pattern modification
Linyong Pang, Chris Clifford, Peter Hu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 12 citations
Engineering, Materials Engineering, Computational Electromagnetics +12
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