Concepedia

Linyong Pang

LP

22

Publications

631

Citations

13

H-Index

2005

Active since

Affiliations

Luminex (United States)(Current)

Xilinx (United States)

Semiconductor Manufacturing International (China)

United Microelectronics (Taiwan)

Linyong Pang is an author at Luminex (United States) specializing in computer engineering, microfabrication, and engineering.

Top concepts

EngineeringComputer EngineeringMicrofabricationMicroelectronics3D PrintingOptoelectronicsApplied PhysicsElectronic PackagingElectrical EngineeringDesign

Publications per year

2005–2021

22

Publications

22

Fast inverse lithography technology

Daniel S. Abrams, Linyong Pang · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 98 citations

Engineering, Electron-beam Lithography, Optic Design +18

Inverse Lithography Technology (ILT): what is the impact to the photomask industry?

Linyong Pang, Yong Liu, Dan Abrams · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 82 citations

Geometric Modeling, Opc Technologies, Mask Shops +15

Inverse lithography technology: 30 years from concept to practical, full-chip reality

Linyong Pang · Journal of Micro/Nanopatterning Materials and Metrology · 2021 · 71 citations

Engineering, Electron-beam Lithography, Inverse Lithography Technology +16

Inverse lithography technology principles in practice: unintuitive patterns

Yong Liu, Dan Abrams, Linyong Pang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 43 citations

Realistic Rendering, Engineering, Electron-beam Lithography +19

Inverse lithography technology (ILT): a natural solution for model-based SRAF at 45nm and 32nm

Linyong Pang, Yong Liu, Dan Abrams · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 34 citations

Engineering, Electron-beam Lithography, Optic Design +25

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