Gregory F. Cardinale

Young's modulus and Poisson's ratio of CVD diamond

Claude Klein, Gregory F. Cardinale · Diamond and Related Materials · 1993 · 256 citations

Diamond-like Carbon, Physics, Applied Physics +2

<title>Photoresist film thickness for extreme ultraviolet lithography</title>

Paul M. Dentinger, Gregory F. Cardinale, Craig C. Henderson et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 27 citations

Optical Materials, Engineering, Electron-beam Lithography +18

Effect of polymer molecular weight on AFM polymer aggregate size and LER of EUV resists

Charlotte Cutler, Joseph F. Mackevich, Jieming Li et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 21 citations

Materials Science, Polymer Material, Engineering +13

Sub-100-nm lithographic imaging with an EUV 10X microstepper

J. E. M. Goldsmith, Kurt W. Berger, Dan R. Bozman et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 21 citations

Optical Engineering, Engineering, Electron-beam Lithography +19

Top-surface imaging resists for EUV lithography

Craig C. Henderson, David R. Wheeler, Tim P. Pollagi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1998 · 15 citations

Short Wavelength Optic, Engineering, Electron-beam Lithography +16