Concepedia

Tim P. Pollagi

TP

1

Publications

15

Citations

1

H-Index

1998

Active since

Affiliations

Sandia National Laboratories California(Current)

Tim P. Pollagi is an author at Sandia National Laboratories California specializing in radiation imaging, microelectronics, and microfabrication.

Top concepts

MicroscopyRadiometry3D PrintingEngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsMicrofabricationRadiation Imaging

Publications per year

1998–1998

1

Publications

1

Top-surface imaging resists for EUV lithography

Craig C. Henderson, David R. Wheeler, Tim P. Pollagi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1998 · 15 citations

Short Wavelength Optic, Engineering, Electron-beam Lithography +16

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