Concepedia

C.D. Schaper

CS

18

Publications

441

Citations

13

H-Index

1991

Active since

Affiliations

Stanford University(Current)

National University of Singapore

Texas Instruments (United States)

C.D. Schaper is an author at Stanford University specializing in engineering, thermal engineering, and heat transfer.

Top concepts

EngineeringThermal EngineeringHeat TransferComputer EngineeringProcess ControlThermal ManagementElectronic PackagingMicroelectronicsMicrofabricationThermal Modeling

Publications per year

1991–2013

18

Publications

18

Identification of chemical processes using canonical variate analysis

C.D. Schaper, Wallace E. Larimore, Dale E. Seborg et al. · Computers & Chemical Engineering · 1994 · 51 citations

Process Control, Process Analysis, Chemometrics +5

Decentralized control of wafer temperature for multizone rapid thermal processing systems

C.D. Schaper, T. Kailath, Yong Jin Lee · IEEE Transactions on Semiconductor Manufacturing · 1999 · 44 citations

Engineering, Energy Efficiency, Wafer Scale Processing +18

Real-time predictive control of photoresist film thickness uniformity

Lay Lay Lee, C.D. Schaper, Weng Khuen Ho · IEEE Transactions on Semiconductor Manufacturing · 2002 · 40 citations

Engineering, Wafer Scale Processing, Resist Thickness Uniformity +17

Control of MMST RTP: repeatability, uniformity, and integration for flexible manufacturing [ICs]

C.D. Schaper, Masoud Moslehi, Krishna C. Saraswat et al. · IEEE Transactions on Semiconductor Manufacturing · 1994 · 34 citations

Real-time Control, Engineering, Flexible Manufacturing Technology +21

Optimal predictive control with constraints for the processing of semiconductor wafers on bake plates

Weng Khuen Ho, Arthur Tay, C.D. Schaper · IEEE Transactions on Semiconductor Manufacturing · 2000 · 33 citations

Engineering, Energy Efficiency, Load Disturbance +19

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