Lay Lay Lee

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Active since

2002

Affiliations

National University of Singapore(Current)

Stanford University

Lay Lay Lee is an author at National University of Singapore specializing in materials science, critical dimension control, and film thickness control.

Publications per year

2002–2004

Publications

Real-time predictive control of photoresist film thickness uniformity

Lay Lay Lee, C.D. Schaper, Weng Khuen Ho · IEEE Transactions on Semiconductor Manufacturing · 2002 · 40 citations

Engineering, Electrical Engineering, Materials Science +14

Resist film uniformity in the microlithography process

Weng Khuen Ho, Lay Lay Lee, Arthur Tay et al. · IEEE Transactions on Semiconductor Manufacturing · 2002 · 19 citations

Engineering, Electrical Engineering, Materials Science +15

On control of resist film uniformity in the microlithography process

Weng Khuen Ho, Arthur Tay, Lay Lay Lee et al. · Control Engineering Practice · 2004 · 11 citations

Engineering, Materials Engineering, Materials Science +14

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