Statistics
Publications
8
Citations
153
H-Index
8
Active since
1994
Affiliations
Haruhiko Kusunose is an author at Laser- und Medizin-Technologie (Germany) specializing in engineering, inspection, and optics.
Publications per year
1994–2020
8
8
The capability of high magnification review function for EUV actinic blank inspection tool
Hiroki Miyai, Tomohiro Suzuki, Kiwamu Takehisa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 26 citations
Engineering, Manufacturing Engineering, Materials Science +16
Actinic patterned mask defect inspection for EUV lithography
Hiroki Miyai, Tsunehito Kohyama, Tomohiro Suzuki et al. · 2019 · 20 citations · Full text
Engineering, Manufacturing Engineering, Materials Engineering +13
Continuous-wave 1934 nm laser with 120 mW output power
Jun Sakuma, Yushi Kaneda, Naoya Oka et al. · Optics Letters · 2015 · 14 citations
Natural Sciences, Physics, Optics +16
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