Concepedia

Wen-Hsien Chuang

WC

6

Publications

212

Citations

6

H-Index

2004

Active since

Affiliations

University of Maryland, College Park(Current)

Integrated Sensors (United States)

Goddard Space Flight Center

Wen-Hsien Chuang is an author at University of Maryland, College Park specializing in applied physics, engineering, and microfabrication.

Top concepts

EngineeringApplied PhysicsThin FilmsMicroelectronicsMicrofabricationElectrical EngineeringMechanical EngineeringMicrostructureNanoelectronicsMaterial Science

Publications per year

2004–2018

6

Publications

6

Mechanical Property Characterization of LPCVD Silicon Nitride Thin Films at Cryogenic Temperatures

Wen-Hsien Chuang, T. Luger, R. Fettig et al. · Journal of Microelectromechanical Systems · 2004 · 99 citations

Cryogenic Temperatures, Engineering, Mechanical Property Characterization +16

End-coupled optical waveguide MEMS devices in the indium phosphide material system

Marcel W. Pruessner, Nathan Siwak, K. Amarnath et al. · Journal of Micromechanics and Microengineering · 2006 · 49 citations

Optical Materials, Engineering, Electrostatic Tuning +25

An electrostatic actuator for fatigue testing of low-stress LPCVD silicon nitride thin films

Wen-Hsien Chuang, Rainer K. Fettig, Reza Ghodssi · Sensors and Actuators A Physical · 2005 · 20 citations

Electrical Engineering, Engineering, Microfabrication +7

Nano-scale fatigue study of LPCVD silicon nitride thin films using a mechanical-amplifier actuator

Wen-Hsien Chuang, Rainer K. Fettig, Reza Ghodssi · Journal of Micromechanics and Microengineering · 2007 · 19 citations

Engineering, Mechanical Engineering, Integrated Circuits +17

Electron Beam Probing of Active Advanced FinFET Circuit with Fin Level Resolution

Tom Tong, Hyun-Hee Ryu, Yuxiao Wang et al. · Proceedings - International Symposium for Testing and Failure Analysis · 2018 · 15 citations

Electrical Engineering, Engineering, Vlsi Design +15

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