Rainer K. Fettig

<title>Cassini infrared Fourier spectroscopic investigation</title>

V. G. Kunde, P. A. R. Ade, Richard Barney et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1996 · 102 citations

Engineering, Satellite Instrumentation, Infrared Sensor +13

Microshutter array development for the James Webb space telescope

Mary J. Li, Nadine Acuna, Edward Amatucci et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 25 citations

An electrostatic actuator for fatigue testing of low-stress LPCVD silicon nitride thin films

Wen-Hsien Chuang, Rainer K. Fettig, Reza Ghodssi · Sensors and Actuators A Physical · 2005 · 20 citations

Electrical Engineering, Engineering, Microfabrication +7

Nano-scale fatigue study of LPCVD silicon nitride thin films using a mechanical-amplifier actuator

Wen-Hsien Chuang, Rainer K. Fettig, Reza Ghodssi · Journal of Micromechanics and Microengineering · 2007 · 19 citations

Engineering, Mechanical Engineering, Integrated Circuits +17

<title>Some aspects on the mechanical analysis of microshutters</title>

Rainer K. Fettig, Jonathan L. Kuhn, Samuel H. Moseley et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 18 citations

Engineering, Micromechanics, Mechanical Analysis +18