Publication | Closed Access
An electrostatic actuator for fatigue testing of low-stress LPCVD silicon nitride thin films
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Citations
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References
2005
Year
Electrical EngineeringEngineeringMicrofabricationFatigue TestingMechanical EngineeringApplied PhysicsElectrostatic ActuatorThin Film Process TechnologyThin FilmsFlexible Sensor
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