T. Luger

Publications

Citations

H-Index

2004

Active since

Affiliations

University of Maryland, College Park(Current)

T. Luger is an author at University of Maryland, College Park specializing in mechanical engineering, mechanical properties, and materials engineering.

Top concepts

Thin FilmsEngineeringMicrostructureApplied PhysicsMaterial ScienceMicroelectronicsElectronic PackagingMaterials EngineeringMechanical PropertiesMechanical Engineering

Publications per year

2004–2004

Publications

Mechanical Property Characterization of LPCVD Silicon Nitride Thin Films at Cryogenic Temperatures

Wen-Hsien Chuang, T. Luger, R. Fettig et al. · Journal of Microelectromechanical Systems · 2004 · 99 citations

Cryogenic Temperatures, Engineering, Mechanical Property Characterization +16

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