Concepedia

R. Nakata

RN

Statistics

Publications

3

Citations

54

H-Index

3

Active since

1990

Affiliations

Toshiba (Japan)(Current)

R. Nakata is an author at Toshiba (Japan) specializing in engineering, microelectronics, and materials engineering.

Top concepts

EngineeringMaterial ScienceMicroelectronicsMaterials EngineeringApplied PhysicsElectronic PackagingElectrical EngineeringCorrosion3D PrintingNanoelectronics

Publications per year

1990–2005

3

Publications

3

Electromigration reliability for a tungsten-filled via hole structure

F. Matsuoka, Hiroshi Iwai, K. Hama et al. · IEEE Transactions on Electron Devices · 1990 · 28 citations

Materials Engineering, Materials Science, Electrical Engineering +12

Slurry engineering for self-stopping, dishing free SiO/sub 2/-CMP

Haruki Nojo, Masahito Kodera, R. Nakata · 2002 · 15 citations

Engineering, New Type, Mechanical Engineering +16

Challenge of low-k materials for 130, 90, 65 nm node interconnect technology and beyond

Hiromi Miyajima, Kazuki Watanabe, Koji Fujita et al. · 2005 · 11 citations

Engineering, Optimum Beol Structures, Interconnect (Integrated Circuits) +17

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