Concepedia

Haruki Nojo

HN

Statistics

Publications

2

Citations

55

H-Index

2

Active since

2002

Affiliations

Toshiba (Japan)(Current)

Haruki Nojo is an author at Toshiba (Japan) specializing in engineering, chemical engineering, and mechanical engineering.

Top concepts

EngineeringSurface ScienceMaterial ScienceMaterial ProcessingChemical EngineeringMaterials EngineeringMechanical EngineeringChemistryCorrosion3D Printing

Publications per year

2002–2010

2

Publications

2

Fundamental Study of Chemical–Mechanical Polishing Slurry of Cobalt Barrier Metal for the Next-Generation Interconnect Process

Hideaki Nishizawa, Haruki Nojo, Akira Isobe · Japanese Journal of Applied Physics · 2010 · 40 citations

Engineering, Mechanical Engineering, Chemistry +20

Slurry engineering for self-stopping, dishing free SiO/sub 2/-CMP

Haruki Nojo, Masahito Kodera, R. Nakata · 2002 · 15 citations

Engineering, New Type, Mechanical Engineering +16

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