Akira Isobe

Fundamental Study of Chemical–Mechanical Polishing Slurry of Cobalt Barrier Metal for the Next-Generation Interconnect Process

Hideaki Nishizawa, Haruki Nojo, Akira Isobe · Japanese Journal of Applied Physics · 2010 · 40 citations

Engineering, Mechanical Engineering, Chemistry +20

Research on Reaction Method of High Removal Rate Chemical Mechanical Polishing Slurry for 4H-SiC Substrate

Hiroshi Nitta, Akira Isobe, Hong Park et al. · Japanese Journal of Applied Physics · 2011 · 35 citations

Materials Engineering, Materials Science, Chemical Engineering +14

Proposal of New Polishing Mechanism Based on Feret's Diameter of Contact Area between Polishing Pad and Wafer

Akira Isobe, Masatoshi Akaji, Shuhei KUROKAWA · Japanese Journal of Applied Physics · 2013 · 29 citations

Engineering, Mechanical Engineering, Surface Integrity +20

Unusual visual and olfactory perceptions during radiotherapy sessions: an investigation of the organs responsible

Naoya Hara, Akira Isobe, Kana Yamada et al. · Journal of Radiation Research · 2021 · 15 citations · Full text

Neuro-oncology, Radiation Medicine, Radiation Therapy +15

Research on Reaction Method of High Removal Rate Chemical Mechanical Polishing Slurry for 4H-SiC Substrate

Hiroshi Nitta, Akira Isobe, Hong Park et al. · Japanese Journal of Applied Physics · 2011 · 13 citations

Materials Engineering, Materials Science, Chemical Engineering +14