W. Y. Hsieh

High resolution electron microscopy of amorphous interlayers between metal thin films and silicon

L.J. Chen, Jhe-Yu Lin, T.L. Lee et al. · Microscopy Research and Technique · 1998 · 46 citations

Natural Sciences, Materials Engineering, Materials Science +16

Simultaneous occurrence of multiphases in the interfacial reactions of ultrahigh vacuum deposited Hf and Cr thin films on (111)Si

W. Y. Hsieh, Jhe-Yu Lin, L. J. Chen · Applied Physics Letters · 1993 · 25 citations

Natural Sciences, Materials Engineering, Materials Science +16

Ta and Ta–N diffusion barriers sputtered with various N2/Ar ratios for Cu metallization

J. H. Wang, L. J. Chen, Zhenchuan Lu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +17

Effects of a new combination of additives in electroplating solution on the properties of Cu films in ULSI applications

Jiumei Hu, T. C. Chang, Chia‐Hua Wu et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 22 citations

Natural Sciences, Materials Engineering, Materials Science +11

Investigation on the Distribution of Fluorine and Boron in Polycrystalline Silicon/Silicon Systems

T. P. Chen, Tan Fu Lei, Chih‐Yung Chang et al. · Journal of The Electrochemical Society · 1995 · 21 citations

Engineering, Materials Engineering, Materials Science +15