Zhenchuan Lu

Effect of Annealing Temperature on the Microstructure and Optical Properties of Lanthanum-Doped Hafnium Oxide

Xiangduo Cui, Kamale Tuokedaerhan, Haotian Cai et al. · Coatings · 2022 · 35 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Ta and Ta–N diffusion barriers sputtered with various N2/Ar ratios for Cu metallization

J. H. Wang, L. J. Chen, Zhenchuan Lu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +17

Effect of Annealing Temperature on the Structure and Properties of La2O3 High-K Gate Dielectric Films Prepared by the Sol-Gel Method

Zhenchuan Lu, Kamale Tuokedaerhan, Haotian Cai et al. · Coatings · 2023 · 14 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Interface tuning and electrical property optimization of La-doped ZrO2 gate dielectric based on solution driving

Haotian Cai, Kamale Tuokedaerhan, Zhenchuan Lu et al. · Vacuum · 2023 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +16

Effect of Annealing Temperature on the Structural, Optical, and Electrical Properties of Al-Doped ZrO2 Gate Dielectric Films Treated by the Sol–Gel Method

Haotian Cai, Kamale Tuokedaerhan, Zhenchuan Lu et al. · Coatings · 2022 · 12 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17