Statistics
Publications
1
Citations
23
H-Index
1
Active since
2002
Affiliations
National Tsing Hua University(Current)
J. H. Wang is an author at National Tsing Hua University specializing in thin-film growth mechanisms, thin-film growth kinetics, and thin-film deposition.
Publications per year
2002–2002
1
1
Ta and Ta–N diffusion barriers sputtered with various N2/Ar ratios for Cu metallization
J. H. Wang, L. J. Chen, Zhenchuan Lu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 23 citations
Natural Sciences, Materials Engineering, Materials Science +17
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