Concepedia

T. C. Chang

TC

3

Publications

81

Citations

3

H-Index

1998

Active since

Affiliations

National Tsing Hua University(Current)

National Yang Ming Chiao Tung University

National Sun Yat-sen University

T. C. Chang is an author at National Tsing Hua University specializing in engineering, materials science, and thin films.

Top concepts

Publications per year

1998–2000

3

Publications

3

Copper electroplating for future ultralarge scale integration interconnection

W. C. Gau, T. C. Chang, Yung‐Hsiang Lin et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 42 citations

, , +20

Effects of a new combination of additives in electroplating solution on the properties of Cu films in ULSI applications

Jiumei Hu, T. C. Chang, Chia‐Hua Wu et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 22 citations

, , +20

Characterization of multilayered Ti/TiN films grown by chemical vapor deposition

Jiumei Hu, T. C. Chang, L.J. Chen et al. · Thin Solid Films · 1998 · 17 citations

, , +7

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