H. Funabashi

Statistics

Publications

Citations

123

H-Index

Active since

2000

Affiliations

Toyota Central Research and Development Laboratories (Japan)(Current)

Toyota Motor Corporation (Japan)

Tohoku University Hospital

Toyota Motor Corporation (Switzerland)

Tohoku University

H. Funabashi is an author at Toyota Central Research and Development Laboratories (Japan) specializing in engineering, sensors, and electrical engineering.

Publications per year

2000–2014

Publications

Anisotropic etching of silicon in (CH/sub 3/)/sub 4/NOH solutions

Osamu Tabata, Ryouji Asahi, H. Funabashi et al. · TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers · 2002 · 25 citations

Engineering, Materials Engineering, Materials Science +12

A Z-axis differential capacitive SOI accelerometer with vertical comb electrodes

Toshiyuki Tsuchiya, H. Funabashi · 2004 · 23 citations

Engineering, Electrical Engineering, Mechanical Engineering +11

Thermal micropressure sensor for pressure monitoring in a minute package

S. N. Wang, K. Mizuno, Motohiro Fujiyoshi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 18 citations

Engineering, Materials Engineering, Materials Science +17

A 1.7mm<sup>3</sup> MEMS-on-CMOS tactile sensor using human-inspired autonomous common bus communication

Mitsutoshi Makihata, Masanori Muroyama, Yuri Nakano et al. · 2013 · 17 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Polycrystalline silicon thin films with hydrofluoric acid permeability for underlying oxide etching and vacuum encapsulation

Yasuyuki Kageyama, Toshiyuki Tsuchiya, H. Funabashi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 14 citations

Engineering, Materials Engineering, Materials Science +15

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