Statistics
Publications
28
Citations
590
H-Index
17
Active since
1980
T. Ohzone is an author at Panasonic (Japan) specializing in engineering, semiconductor devices, and microelectronics.
Publications per year
1980–2005
28
28
A practical trench isolation technology with a novel planarization process
G. Fuse, Hiroshi Ogawa, K. Tateiwa et al. · 1987 · 37 citations
1–5 of 28