Seok-Jun Won

High-Quality Low-Temperature Silicon Oxide by Plasma-Enhanced Atomic Layer Deposition Using a Metal–Organic Silicon Precursor and Oxygen Radical

Seok-Jun Won, Sungin Suh, Myung Soo Huh et al. · IEEE Electron Device Letters · 2010 · 77 citations

Natural Sciences, Materials Engineering, Materials Science +16

Plasma-Enhanced Atomic Layer Deposition of TiO[sub 2] and Al-Doped TiO[sub 2] Films Using N[sub 2]O and O[sub 2] Reactants

Gyu‐Jin Choi, Seong Keun Kim, Seok-Jun Won et al. · Journal of The Electrochemical Society · 2009 · 48 citations

Natural Sciences, Materials Engineering, Materials Science +17

Growth and electrical properties of silicon oxide grown by atomic layer deposition using Bis(ethyl-methyl-amino)silane and ozone

Seok-Jun Won, Hyung-Suk Jung, Sungin Suh et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2011 · 33 citations

Engineering, Materials Engineering, Materials Science +17

The Role of the Methyl and Hydroxyl Groups of Low-k Dielectric Films on the Nucleation of Ruthenium by ALD

Jaeyeong Heo, Seok-Jun Won, Dail Eom et al. · Electrochemical and Solid-State Letters · 2008 · 27 citations

Natural Sciences, Chemistry, Materials Science +17

Improving the Morphological and Optical Properties of Sputtered Indium Tin Oxide Thin Films by Adopting Ultralow-Pressure Sputtering

Myung Soo Huh, Bong Seop Yang, Jaewon Song et al. · Journal of The Electrochemical Society · 2008 · 27 citations

Natural Sciences, Materials Engineering, Materials Science +17