Al‐Doped TiO₂ Films with Ultralow Leakage Currents for Next Generation DRAM Capacitors

Seong Keun Kim, Gyu‐Jin Choi, Sang‐Young Lee, +5

Advanced Materials

Materials ScienceMaterials EngineeringElectrical EngineeringMaterial AnalysisEngineering +12

Chemical Vapor Deposition of Ru Thin Films with an Enhanced Morphology, Thermal Stability, and Electrical Properties Using a RuO₄ Precursor

Jeong Hwan Han, Sang Woon Lee, Gyu‐Jin Choi, +4

Chemistry of Materials

Materials ScienceMaterials EngineeringRu Thin FilmsEngineeringSurface Science +10

Impact of O3 feeding time on TiO2 films grown by atomic layer deposition for memory capacitor applications

Seong Keun Kim, Sang‐Young Lee, Gyu‐Jin Choi, +1

Journal of Applied Physics

EngineeringThin Film Process TechnologyTio2 Thin FilmsChemical DepositionNanoelectronics +17

Plasma-Enhanced Atomic Layer Deposition of TiO[sub 2] and Al-Doped TiO[sub 2] Films Using N[sub 2]O and O[sub 2] Reactants

Gyu‐Jin Choi, Seong Keun Kim, Seok-Jun Won, +2

Journal of The Electrochemical Society

Materials ScienceMaterials EngineeringChemical EngineeringRu ElectrodesEngineering +11

Controlled Light Emission by Nanoencapsulation of Fluorophores in Thin Films of Diblock Copolymer Micelles

Seong Il Yoo, Sung Jin An, Gyu‐Jin Choi, +5

Advanced Materials

Fluorescence MicroscopyEngineeringDiblock Copolymer MicellesPhosphorescenceMicelle +13

Atomic Layer Deposition of TiO[sub 2] Films on Ru Buffered TiN Electrode for Capacitor Applications

Gyu‐Jin Choi, Seong Keun Kim, Sang‐Young Lee, +3

Journal of The Electrochemical Society

Materials ScienceMaterials EngineeringCrystal StructureDielectric ConstantEngineering +13

The Formation of an Almost Full Atomic Monolayer via Surface Modification by N₂O-Plasma in Atomic Layer Deposition of ZrO₂ Thin Films

Seok-Jun Won, Ju-Youn Kim, Gyu‐Jin Choi, +3

Chemistry of Materials

Hfo2 Thin FilmsEngineeringThin Film Process TechnologyChemistryChemical Deposition +16

ZnS Quantum Dot Based Acetone Sensor for Monitoring Health-Hazardous Gases in Indoor/Outdoor Environment

Rajneesh Kumar Mishra, Gyu‐Jin Choi, Hyeon‐Jong Choi, +1

Micromachines

EngineeringZns QdsGas SensorSolid-state ChemistryLow Cost Sensor +17

Controlling the Composition of Doped Materials by ALD: A Case Study for Al-Doped TiO[sub 2] Films

Seong Keun Kim, Gyu‐Jin Choi, Cheol Seong Hwang

Electrochemical and Solid-State Letters

Materials ScienceMaterials EngineeringChemical EngineeringAluminium NitrideEngineering +13

Substrate Dependent Growth Rate of Plasma-Enhanced Atomic Layer Deposition of Titanium Oxide Using N[sub 2]O Gas

Seok-Jun Won, Sungin Suh, Sang Woon Lee, +3

Electrochemical and Solid-State Letters

Materials ScienceEpitaxial GrowthEngineeringPlasma ProcessingSurface Science +9