Sungin Suh - Concepedia

Author

Sungin Suh

Samsung (South Korea)

Also Known As

Sung-In Suh, Sungin Suh

Publications

216

Citations

H-Index

Concepts

All Affiliations

Samsung (South Korea)Seoul National University

About

Sungin Suh is an author at Samsung (South Korea) specializing in surface science, applied physics, and engineering.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	6	6	188
2	Applied Physics	6	6	188
3	Chemical Engineering	4	4	135
4	Chemistry	2	2	99
5	Electrical Engineering	2	2	54

Sungin Suh

Publications

203

Citations

H-Index

Page 1

	Year	Citations
High-Quality Low-Temperature Silicon Oxide by Plasma-Enhanced Atomic Layer Deposition Using a Metal–Organic Silicon Precursor and Oxygen Radical Seok-Jun Won, Sungin Suh, Myung Soo Huh, IEEE Electron Device Letters Materials ScienceMaterials EngineeringChemical EngineeringLow TemperaturesEngineering	2010	76
Growth and electrical properties of silicon oxide grown by atomic layer deposition using Bis(ethyl-methyl-amino)silane and ozone Seok-Jun Won, Hyung-Suk Jung, Sungin Suh, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Materials ScienceSemiconductorsElectrical EngineeringLow TemperaturesEngineering	2011	32
Effect of Catalyst Layer Density and Growth Temperature in Rapid Atomic Layer Deposition of Silica Using Tris(<i>tert</i>-pentoxy)silanol Seok-Jun Won, Joon Rae Kim, Sungin Suh, ACS Applied Materials & Interfaces EngineeringThin Film Process TechnologyChemistryChemical DepositionSilica Using Tris	2011	23
Low-temperature SiON films deposited by plasma-enhanced atomic layer deposition method using activated silicon precursor Sungin Suh, Seung Wook Ryu, Seongjae Cho, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films EngineeringSin FilmChemical DepositionSilicon On InsulatorPlasma Processing	2015	22
Substrate Dependent Growth Rate of Plasma-Enhanced Atomic Layer Deposition of Titanium Oxide Using N[sub 2]O Gas Seok-Jun Won, Sungin Suh, Sang Woon Lee, Electrochemical and Solid-State Letters Materials ScienceEpitaxial GrowthEngineeringPlasma ProcessingSurface Science	2009	21
Capacitance and Interface Analysis of Transparent Analog Capacitor Using Indium Tin Oxide Electrodes and High-k Dielectrics Seok-Jun Won, Myung Soo Huh, Sang‐Hyun Park, Journal of The Electrochemical Society	2010	15
Investigation on spatially separated atomic layer deposition by gas flow simulation and depositing Al2O3 films Sungin Suh, Sang-Hyun Park, Hajin Lim, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films EngineeringThin Film Process TechnologyVacuum DeviceChemical DepositionChemical Engineering	2012	14

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