Sungin Suh

High-Quality Low-Temperature Silicon Oxide by Plasma-Enhanced Atomic Layer Deposition Using a Metal–Organic Silicon Precursor and Oxygen Radical

Seok-Jun Won, Sungin Suh, Myung Soo Huh et al. · IEEE Electron Device Letters · 2010 · 77 citations

Natural Sciences, Materials Engineering, Materials Science +16

Growth and electrical properties of silicon oxide grown by atomic layer deposition using Bis(ethyl-methyl-amino)silane and ozone

Seok-Jun Won, Hyung-Suk Jung, Sungin Suh et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2011 · 33 citations

Engineering, Materials Engineering, Materials Science +17

Effect of Catalyst Layer Density and Growth Temperature in Rapid Atomic Layer Deposition of Silica Using Tris(<i>tert</i>-pentoxy)silanol

Seok-Jun Won, Joon Rae Kim, Sungin Suh et al. · ACS Applied Materials & Interfaces · 2011 · 25 citations

Natural Sciences, Chemistry, Materials Science +17

Low-temperature SiON films deposited by plasma-enhanced atomic layer deposition method using activated silicon precursor

Sungin Suh, Seung Wook Ryu, Seongjae Cho et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2015 · 23 citations

Engineering, Materials Engineering, Materials Science +17

Substrate Dependent Growth Rate of Plasma-Enhanced Atomic Layer Deposition of Titanium Oxide Using N[sub 2]O Gas

Seok-Jun Won, Sungin Suh, Sang Woon Lee et al. · Electrochemical and Solid-State Letters · 2009 · 21 citations

Natural Sciences, Materials Engineering, Materials Science +17