S. Nakamura is an author at Toshiba (Japan) specializing in applied physics, surface science, and engineering.
Top concepts
EngineeringApplied PhysicsSurface ScienceThin FilmsMaterial ScienceMicroelectronicsMaterials EngineeringElectrical EngineeringNanoelectronicsCrystalline Defects
Publications per year
1993–2002
3
3
Analysis of resistance behavior in Ti- and Ni-salicided polysilicon films
T. Ohguro, S. Nakamura, M. Koike et al. · IEEE Transactions on Electron Devices · 1994 · 151 citations
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