Concepedia

Ryuji Ohnishi

RO

Statistics

Publications

4

Citations

62

H-Index

4

Active since

2007

Affiliations

University of Hyogo(Current)

Ryuji Ohnishi is an author at University of Hyogo specializing in extreme ultraviolet lithography, materials science, and natural sciences.

Publications per year

2007–2011

4

Publications

4

Backexposure Effect in Chemically Amplified Resist Process upon Exposure to Extreme Ultraviolet Radiation

Takahiro Kozawa, Seiichi Tagawa, Ryuji Ohnishi et al. · Japanese Journal of Applied Physics · 2011 · 22 citations

Natural Sciences, Electrical Engineering, Materials Science +12

Dual Grating Interferometric Lithography for 22-nm Node

Hideaki Shiotani, Shota Suzuki, Dong‐Gun Lee et al. · Japanese Journal of Applied Physics · 2008 · 19 citations

Natural Sciences, Materials Science, Physics +12

Pattern Replication in EUV Interference Lithography

Shota Suzuki, Yasuyuki Fukushima, Ryuji Ohnishi et al. · Journal of Photopolymer Science and Technology · 2008 · 11 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +11

Mitigation of Low LER with PAG Bonded Resist for EUVL

Yasuyuki Fukushima, Takeo Watanabe, Ryuji Ohnishi et al. · Journal of Photopolymer Science and Technology · 2007 · 10 citations · Full text

Natural Sciences, Electrical Engineering, Materials Science +10

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