Concepedia

Hideaki Shiotani

HS

Statistics

Publications

3

Citations

62

H-Index

3

Active since

2006

Affiliations

University of Hyogo(Current)

Toyoda Gosei (Germany)

Hideaki Shiotani is an author at University of Hyogo specializing in line-edge roughness, line roughness, and extreme ultraviolet lithography.

Publications per year

2006–2008

3

Publications

3

CA Resist with Side Chain PAG Group for EUV Resist

Takao Watanabe, Yasuyuki Fukushima, Hideaki Shiotani et al. · Journal of Photopolymer Science and Technology · 2006 · 33 citations · Full text

, , +15

Dual Grating Interferometric Lithography for 22-nm Node

Hideaki Shiotani, Shota Suzuki, Dong‐Gun Lee et al. · Japanese Journal of Applied Physics · 2008 · 19 citations

, , +12

Mitigation of Low LER with PAG Bonded Resist for EUVL

Yasuyuki Fukushima, Takeo Watanabe, Ryuji Ohnishi et al. · Journal of Photopolymer Science and Technology · 2007 · 10 citations · Full text

, , +10

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