Statistics
Publications
3
Citations
56
H-Index
3
Active since
2009
Affiliations
Carl Zeiss (Germany)(Current)
T. Hofmann is an author at Carl Zeiss (Germany) specializing in mask repair, materials engineering, and materials science.
Publications per year
2009–2014
3
3
Gas assisted focused electron beam induced etching of alumina
T. Bret, B. Afra, Rainer Becker et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 20 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +16
1–3 of 3