Statistics
Publications
3
Citations
122
H-Index
3
Active since
1981
Affiliations
Fujitsu (Japan)(Current)
Mitsuhiro Yano is an author at Fujitsu (Japan) specializing in engineering, semiconductor materials, and optical properties of semiconductors.
Publications per year
1981–1999
3
3
Advanced electron-beam writing system EX-11 for next-generation mask fabrication
Toru Tojo, Ryoji Yoshikawa, Yoji Ogawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 11 citations
Engineering, Manufacturing Engineering, Electronic Materials +9
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