Wooyung Jung

Patterning with amorphous carbon spacer for expanding the resolution limit of current lithography tool

Wooyung Jung, Sang‐Min Kim, Choi-Dong Kim et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 32 citations

Engineering, Materials Engineering, Materials Science +15

Patterning with spacer for expanding the resolution limit of current lithography tool

Wooyung Jung, Choi-Dong Kim, Jae-Doo Eom et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 32 citations

Engineering, Computer Engineering, Interconnection Networks +12

Overlay improvement in nanoimprint lithography for 1×-nm patterning

Kazuya Fukuhara, Masato Suzuki, Masaki Mitsuyasu et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2016 · 13 citations

Engineering, Electrical Engineering, Manufacturing Engineering +15

NIL defect performance toward high volume mass production

Masayuki Hatano, Kei Kobayashi, Hiroyuki Kashiwagi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 11 citations

Engineering, Manufacturing Engineering, Materials Science +15