16
Publications
439
Citations
12
H-Index
1988
Active since
Masayuki Hatano is an author at Toshiba (Japan) specializing in engineering, electrical engineering, and applied physics.
Top concepts
EngineeringElectrical EngineeringApplied PhysicsMaterial SciencePhysicsMicroelectronicsMicrofabricationElectrical InsulationHigh Voltage EngineeringNanoelectronics
Publications per year
1988–2018
16
16
Tsutomu Sato, Ichiro Mizushima, Shuichi Taniguchi et al. · Japanese Journal of Applied Physics · 2004 · 80 citations
Engineering, Silicon-on-nothing Structure, Micro-optical Component +21
Rows per page
1–5 of 16