Concepedia

Choi-Dong Kim

CK

2

Publications

64

Citations

2

H-Index

2006

Active since

Affiliations

Lam Research (United States)(Current)

Choi-Dong Kim is an author at Lam Research (United States) specializing in engineering, computer-aided design, and computer engineering.

Top concepts

3D PrintingEngineeringMicroelectronicsMicrofabricationComputer EngineeringComputer-aided DesignMicroscopyApplied PhysicsNanolithographyMaterial Science

Publications per year

2006–2007

2

Publications

2

Patterning with amorphous carbon spacer for expanding the resolution limit of current lithography tool

Wooyung Jung, Sang‐Min Kim, Choi-Dong Kim et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 32 citations

Engineering, Electron-beam Lithography, Double Patterning Technique +20

Patterning with spacer for expanding the resolution limit of current lithography tool

Wooyung Jung, Choi-Dong Kim, Jae-Doo Eom et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 32 citations

Engineering, Electron-beam Lithography, Microscopy +16

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