Concepedia

Genji Nakamura

GN

Statistics

Publications

4

Citations

152

H-Index

4

Active since

2006

Affiliations

National Institute for Materials Science(Current)

Genji Nakamura is an author at National Institute for Materials Science specializing in engineering, materials science, and thin films.

Top concepts

EngineeringMaterial ScienceThin FilmsSurface SciencePhysicsChemistryApplied PhysicsNanoelectronicsMicroelectronicsChemical Engineering

Publications per year

2006–2012

4

Publications

4

Modified Oxygen Vacancy Induced Fermi Level Pinning Model Extendable to P-Metal Pinning

Y. Akasaka, Genji Nakamura, Kenji Shiraishi et al. · Japanese Journal of Applied Physics · 2006 · 105 citations

Engineering, Silicon On Insulator, Semiconductor Device +17

Evaluation of high thermal stability cyclopentadienyl Hf precursors with H2O as a co-reactant for advanced gate logic applications

Steven Consiglio, Robert D. Clark, Genji Nakamura et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2011 · 20 citations

Materials Science, Inorganic Chemistry, Chemical Engineering +13

Physical and Electrical Effects of the Dep-Anneal-Dep-Anneal (DADA) Process for HfO<sub>2</sub> in High K/Metal Gate Stacks

Robert D. Clark, Shintaro Aoyama, Steven Consiglio et al. · ECS Transactions · 2011 · 16 citations

Materials Science, Electrical Results, Electrical Engineering +15

HfxZr1−xO2 compositional control using co-injection atomic layer deposition

Steven Consiglio, Kandabara Tapily, Robert D. Clark et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2012 · 11 citations

Materials Science, Materials Engineering, Chemical Engineering +14

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