Concepedia

Shintaro Aoyama

SA

3

Publications

46

Citations

3

H-Index

1995

Active since

Affiliations

Tokyo Electron (Japan)(Current)

Shintaro Aoyama is an author at Tokyo Electron (Japan) specializing in applied physics, thin films, and materials science.

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Publications per year

1995–2015

3

Publications

3

Effects of interfacial roughness on the leakage properties of SrTiO<sub>3</sub> thin film capacitors

Yukio Fukuda, Katsuhiro Aoki, Ken Numata et al. · Integrated ferroelectrics · 1995 · 16 citations

, , +15

Physical and Electrical Effects of the Dep-Anneal-Dep-Anneal (DADA) Process for HfO<sub>2</sub> in High K/Metal Gate Stacks

Robert D. Clark, Shintaro Aoyama, Steven Consiglio et al. · ECS Transactions · 2011 · 16 citations

, , +15

Periodic oxidation for fabricating titanium oxynitride thin films via atomic layer deposition

Shinya Iwashita, Shintaro Aoyama, Masayuki Nasu et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2015 · 14 citations

, , +13

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