Concepedia

Shinya Iwashita

SI

13

Publications

390

Citations

11

H-Index

2005

Active since

Affiliations

Kyushu University(Current)

Ruhr University Bochum

Tokyo Electron (Japan)

Hungarian Academy of Sciences

HUN-REN Wigner Research Centre for Physics

Shinya Iwashita is an author at Kyushu University specializing in engineering, applied physics, and physics.

Top concepts

EngineeringApplied PhysicsPhysicsElectrical EngineeringDusty PlasmaNanotechnologyPlasma PhysicsSurface ScienceMaterial ScienceThin Films

Publications per year

2005–2018

13

Publications

13

Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect

E Schüngel, Q.-Z. Zhang, Shinya Iwashita et al. · Journal of Physics D Applied Physics · 2011 · 66 citations · Full text

Engineering, Glow Discharge, Plasma Physics +18

Highly Stable a-Si:H Films Deposited by Using Multi-Hollow Plasma Chemical Vapor Deposition

Kazunori Koga, Toshihisa Inoue, Kouki Bando et al. · Japanese Journal of Applied Physics · 2005 · 58 citations

Engineering, Vacuum Device, Silicon On Insulator +16

The effect of dust on electron heating and dc self-bias in hydrogen diluted silane discharges

E Schüngel, Sebastian Mohr, Shinya Iwashita et al. · Journal of Physics D Applied Physics · 2013 · 51 citations

Silane Discharge, Engineering, Glow Discharge +24

Nano-factories in plasma: present status and outlook

Masaharu Shiratani, Kazunori Koga, Shinya Iwashita et al. · Journal of Physics D Applied Physics · 2011 · 45 citations

Nanoparticles, Engineering, Nanosystems +21

Transport of nano-particles in capacitively coupled rf discharges without and with amplitude modulation of discharge voltage

Kazunori Koga, Shinya Iwashita, Masaharu Shiratani · Journal of Physics D Applied Physics · 2007 · 31 citations

Engineering, Fast Transport, Glow Discharge +17

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