E. A. Maximovskii

Statistics

Publications

Citations

186

H-Index

Active since

1997

Affiliations

Nikolaev Institute of Inorganic Chemistry(Current)

Siberian Branch of the Russian Academy of Sciences

Novosibirsk State University

Russian Academy of Sciences

Institute of Semiconductor Physics

E. A. Maximovskii is an author at Nikolaev Institute of Inorganic Chemistry specializing in materials science, natural sciences, and materials engineering.

Publications per year

1997–2017

Publications

Thin silicon carbonitride films are perspective low-k materials

M. L. Kosinova, Yu. M. Rumyantsev, E. A. Maximovskii et al. · Journal of Physics and Chemistry of Solids · 2007 · 54 citations

Natural Sciences, Materials Engineering, Materials Science +12

Use of hexamethylcyclotrisilazane for preparation of transparent films of complex compositions

A. N. Golubenko, Yu. M. Rumyantsev, E. A. Maximovskii · Glass Physics and Chemistry · 2009 · 33 citations

Natural Sciences, Chemistry, Materials Science +14

The investigation of properties of silicon nitride films obtained by RPECVD from hexamethyldisilazane

Yu. M. Rumyantsev, M. L. Kosinova, G.S. Yurjev et al. · Applied Surface Science · 1997 · 31 citations

Natural Sciences, Materials Engineering, Materials Science +12

Study of Cu diffusion behavior in carbon rich SiCN:H films deposited from trimethylphenylsilane

K. P. Mogilnikov, Yu. Rumyantsev, Vadim N. Kichay et al. · Thin Solid Films · 2015 · 20 citations

Natural Sciences, Materials Engineering, Materials Science +16

Synthesis of silicon carbonitride dielectric films with improved optical and mechanical properties from tetramethyldisilazane

A. N. Golubenko, Yu. M. Rumyantsev, V. G. Kesler et al. · Glass Physics and Chemistry · 2013 · 20 citations

Natural Sciences, Materials Engineering, Materials Science +13

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