Yu. M. Rumyantsev

Growth of PbS and CdS thin films by low-pressure chemical vapour deposition using dithiocarbamates

M. L. Kosinova, Yu. M. Rumyantsev, E. G. Salman et al. · Thin Solid Films · 1996 · 84 citations

Materials Science, Ii-vi Semiconductor, Engineering +8

Thin silicon carbonitride films are perspective low-k materials

M. L. Kosinova, Yu. M. Rumyantsev, E. A. Maximovskii et al. · Journal of Physics and Chemistry of Solids · 2007 · 53 citations

Materials Science, Perspective Low-k Materials, Engineering +6

Synthesis of nanocrystalline silicon carbonitride films by remote plasma enhanced chemical vapor deposition using the mixture of hexamethyldisilazane with helium and ammonia

Yu. M. Rumyantsev, A. N. Golubenko, M. L. Kosinova et al. · Journal of Crystal Growth · 2002 · 40 citations

Materials Science, Chemical Engineering, Remote Plasma +8

Study of structure and phase composition of nanocrystal silicon carbonitride films

E.A. Maximovski, Yu. M. Rumyantsev, M. L. Kosinova et al. · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 2001 · 33 citations

Materials Science, Nanocrystalline Material, Nanosheet +10

Use of hexamethylcyclotrisilazane for preparation of transparent films of complex compositions

A. N. Golubenko, Yu. M. Rumyantsev, E. A. Maximovskii · Glass Physics and Chemistry · 2009 · 33 citations